Publication:

Off-axis Raman spectroscopy for nanoscale stress metrology

Date

2022
Journal article
https://doi.org/10.1063/5.0100602
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dc.contributor.authorKhan, Zoheb
dc.contributor.authorNuytten, Thomas
dc.contributor.authorFavia, Paola
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorKhan, Zoheb
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2022-11-30T07:58:37Z
dc.date.available2022-08-05T02:35:56Z
dc.date.available2022-11-30T07:58:37Z
dc.date.embargo2023-07-18
dc.date.issued2022
dc.identifier.doi10.1063/5.0100602
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40213
dc.publisherAIP Publishing
dc.source.beginpage035104
dc.source.endpagena
dc.source.issue3
dc.source.journalJOURNAL OF APPLIED PHYSICS
dc.source.numberofpages11
dc.source.volume132
dc.subject.keywordsSTRAINED SILICON
dc.subject.keywordsSIGE
dc.subject.keywordsGE
dc.subject.keywordsENHANCEMENT
dc.subject.keywordsDEVICES
dc.subject.keywordsDIAMOND
dc.subject.keywordsSTRIPES
dc.subject.keywordsGAP
dc.title

Off-axis Raman spectroscopy for nanoscale stress metrology

dc.typeJournal article
dspace.entity.typePublication
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