Publication:

Heterogeneous integration and fabrication of III-V MOS devices in a 200mm processing environment

Date

2011

Proceedings Paper

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Files

21504.pdf 1.18 MB

Author(s)

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Vincent, Benjamin

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Firrincieli, Andrea

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Winderickx, Gillis

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De Jaeger, Brice

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Absil, Philippe

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Hoffmann, Thomas Y.

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1976 since deposited on 2021-10-19

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Acq. date: 2026-04-06