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Cu resistivity and intrinsic EM-reliability study in Ta/Cu, Co/Cu and Ru/Cu systems for advanced BEOL Cu interconnections
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2048 since deposited on 2021-10-25
Acq. date: 2026-02-26
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Statistics
Views
2048 since deposited on 2021-10-25
Acq. date: 2026-02-26
Citations