Publication:

Dry Resist Metrology Readiness for High-NA EUVL

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2658280
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dc.contributor.authorLorusso, Gian
dc.contributor.authorVan den Heuvel, Dieter
dc.contributor.authorZidan, Mohamed
dc.contributor.authorMoussa, Alain
dc.contributor.authorBeral, Christophe
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Silva, Anuja
dc.contributor.authorVerveniotis, Elisseos
dc.contributor.authorHaider, Ali
dc.contributor.authorKondo, Tsuyoshi
dc.contributor.authorShindo, Hiroyuki
dc.contributor.authorEbizuka, Yasushi
dc.contributor.authorIsawa, Miki
dc.contributor.imecauthorVan den Heuvel, Dieter
dc.contributor.imecauthorZidan, Mohamed
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecMoussa, Alain::0000-0002-6377-4199
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecVan Den Heuvel, Dieter::0009-0008-6879-2178
dc.contributor.orcidimecLorusso, Gian::0000-0003-3498-5082
dc.date.accessioned2024-04-08T12:32:52Z
dc.date.available2023-07-28T17:39:47Z
dc.date.available2024-04-08T12:32:52Z
dc.date.issued2023
dc.identifier.doi10.1117/12.2658280
dc.identifier.eisbn978-1-5106-6100-4
dc.identifier.isbn978-1-5106-6099-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42228
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 1249612
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVII
dc.source.conferencedateFEB 27-MAR 02, 2023
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages10
dc.source.volume12496
dc.title

Dry Resist Metrology Readiness for High-NA EUVL

dc.typeProceedings paper
dspace.entity.typePublication
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