Publication:
Hole trap generation in gate dielectric during substrate hole injection
Date
| dc.contributor.author | Zhang, J.F. | |
| dc.contributor.author | Sii, H.K. | |
| dc.contributor.author | Chen, A.H. | |
| dc.contributor.author | Zhao, C.Z. | |
| dc.contributor.author | Uren, M.J. | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-15T18:12:31Z | |
| dc.date.available | 2021-10-15T18:12:31Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9969 | |
| dc.source.beginpage | L1 | |
| dc.source.endpage | L3 | |
| dc.source.issue | 1 | |
| dc.source.journal | Semiconductor Science and Technology | |
| dc.source.volume | 19 | |
| dc.title | Hole trap generation in gate dielectric during substrate hole injection | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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