Publication:

Aqueous chemical solution deposition of ultrathin high-k dielectric metal oxide films

Date

2007

Proceedings Paper

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Author(s)

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Van Elshocht, Sven

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Van Bael, Marlies

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;

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De Gendt, Stefan

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Adelmann, Christoph

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Conard, Thierry

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Witters, Thomas

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D'Olieslaeger, Marc

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