Publication:
ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis
Date
| dc.contributor.author | Sajavaara, Timo | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Giangrandi, Simone | |
| dc.contributor.author | Arstila, Kai | |
| dc.contributor.author | Vantomme, Andre | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vantomme, Andre | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T15:58:50Z | |
| dc.date.available | 2021-10-15T15:58:50Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9542 | |
| dc.source.conference | 8th European Conference on Accelerators in Applied Research and Technology | |
| dc.source.conferencedate | 20/09/2004 | |
| dc.source.conferencelocation | Paris France | |
| dc.title | ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
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