Publication:
On the characterization of the strain field of lattice defects in silicon with nanometer resolution
Date
| dc.contributor.author | Janssens, Koenraad | |
| dc.contributor.author | Van der Biest, O. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Maes, Herman | |
| dc.date.accessioned | 2021-09-29T12:42:27Z | |
| dc.date.available | 2021-09-29T12:42:27Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/206 | |
| dc.source.beginpage | 22 | |
| dc.source.conference | Defect Recognition and Image Processing in Semiconductors and Devices; 6-10 Sept. 1993; Santander, Spain. | |
| dc.source.endpage | 24 | |
| dc.title | On the characterization of the strain field of lattice defects in silicon with nanometer resolution | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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