Publication:

Addressing Integration Challenges in Direct Backside Contact of CFET

Date

2025
Proceedings Paper
https://doi.org/10.1109/IITC66087.2025.11075391
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dc.contributor.authorSheng, Cassie
dc.contributor.authorDemuynck, Steven
dc.contributor.authorStiers, Karen
dc.contributor.authorPeng, A.
dc.contributor.authorToledo de Carvalho Cavalcante, Camila
dc.contributor.authorChiarella, Thomas
dc.contributor.authorVandooren, Anne
dc.contributor.authorHosseini, Maryam
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorPuttarame Gowda, Pallavi
dc.contributor.authorSebaai, Farid
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorChukka, Rami
dc.contributor.authorDi Donato, L.
dc.contributor.authorSun, W.
dc.contributor.authorHasan, Mahmudul
dc.contributor.authorWeldeslassie, Ataklti
dc.contributor.authorCerbu, Dorin
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorMingardi, Andrea
dc.date.accessioned2026-03-19T10:28:02Z
dc.date.available2026-03-19T10:28:02Z
dc.date.createdwos2025-10-18
dc.date.issued2025
dc.description.abstractThis work explores the integration challenges of direct backside contact (DBC) to the source and drain (SD) of the bottom PMOS in complementary field-effect transistors (CFET). We investigate various contact failures, including backside bottom contact opens and via contact opens. Through root cause analysis, we apply multiple integration approaches to mitigate these challenges. Our results demonstrate a significant improvement in PMOS DBC enhancing contact success rate.
dc.identifier.doi10.1109/IITC66087.2025.11075391
dc.identifier.isbn979-8-3315-3782-1
dc.identifier.issn2380-632X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58874
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherIEEE
dc.source.beginpageN/A
dc.source.conferenceIEEE International Interconnect Technology Conference (IITC)
dc.source.conferencedate2025-06-02
dc.source.conferencelocationBusan
dc.source.journal2025 IEEE INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, IITC
dc.source.numberofpages3
dc.title

Addressing Integration Challenges in Direct Backside Contact of CFET

dc.typeProceedings paper
dspace.entity.typePublication
imec.identified.statusLibrary
imec.internal.crawledAt2025-10-22
imec.internal.sourcecrawler
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