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In situ crystallisation in ZrO2 thin films during high temperature X-ray diffraction
Publication:
In situ crystallisation in ZrO2 thin films during high temperature X-ray diffraction
Date
2001
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Chao
;
Roebben, G.
;
Bender, Hugo
;
Young, Edward
;
Haukka, S.
;
Houssa, Michel
;
Naili, Mohamed
;
De Gendt, Stefan
;
Heyns, Marc
;
Van der Biest, O.
Journal
Microelectronics Reliability
Abstract
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1968
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1968
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations