Publication:
Process options to enable (Sub-)1e-9 Ohm.cm2 contact resistivity on Si devices
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1 since deposited on 2021-10-23
Acq. date: 2025-12-16
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1870 since deposited on 2021-10-23
Acq. date: 2025-12-16
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1 since deposited on 2021-10-23
Acq. date: 2025-12-16
Views
1870 since deposited on 2021-10-23
Acq. date: 2025-12-16
Citations