Publication:

LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION

Date

2021
Proceedings Paper
https://doi.org/10.1109/MEMS51782.2021.9375168
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Author(s)

Sattari, Hamed
;
Takabayashi, Alain Y.
;
Edinger, Pierre
;
Verheyen, Peter  
;
Gylfason, Kristinn B.
;
Bogaerts, Wim  
;
Quack, Niels

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na

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