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LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION
Publication:
LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION
Date
2021
Proceedings Paper
https://doi.org/10.1109/MEMS51782.2021.9375168
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1.28 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sattari, Hamed
;
Takabayashi, Alain Y.
;
Edinger, Pierre
;
Verheyen, Peter
;
Gylfason, Kristinn B.
;
Bogaerts, Wim
;
Quack, Niels
Journal
na
Abstract
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since deposited on 2022-03-16
436
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Downloads
263
since deposited on 2022-03-16
113
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Views
1867
since deposited on 2022-03-16
436
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations