Publication:

LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION

Date

2021
Proceedings Paper
https://doi.org/10.1109/MEMS51782.2021.9375168
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dc.contributor.authorSattari, Hamed
dc.contributor.authorTakabayashi, Alain Y.
dc.contributor.authorEdinger, Pierre
dc.contributor.authorVerheyen, Peter
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorBogaerts, Wim
dc.contributor.authorQuack, Niels
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.date.accessioned2022-03-16T13:42:15Z
dc.date.available2022-03-16T13:42:15Z
dc.date.issued2021
dc.identifier.doi10.1109/MEMS51782.2021.9375168
dc.identifier.eisbn978-1-6654-1912-3
dc.identifier.issn1084-6999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39451
dc.publisherIEEE
dc.source.beginpage298
dc.source.conference34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
dc.source.conferencedateJAN 25-29, 2021
dc.source.conferencelocationVirtual
dc.source.endpage301
dc.source.journalna
dc.source.numberofpages4
dc.title

LOW-VOLTAGE SILICON PHOTONIC MEMS SWITCH WITH VERTICAL ACTUATION

dc.typeProceedings paper
dspace.entity.typePublication
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