Publication:

Strain characterization and simulation for MOSFETs with embedded source/drain stressors

Date

2014-04
Proceedings Paper
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dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorVerheyen, Peter
dc.contributor.authorVincent, Benjamin
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorClaeys, Cor
dc.contributor.authorBuhler, Rudolf
dc.contributor.authorMartino, Joao
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorThean, Aaron
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-22T05:50:49Z
dc.date.available2021-10-22T05:50:49Z
dc.date.issued2014-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24527
dc.source.conferenceSEMINATEC
dc.source.conferencedate24/04/2014
dc.source.conferencelocationSao Paolo Brazil
dc.title

Strain characterization and simulation for MOSFETs with embedded source/drain stressors

dc.typeProceedings paper
dspace.entity.typePublication
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