Publication:
Electron spin resonance analysis of interfacial Si dangling bond type defects in stack of ultrathin SiO2, Al2O3, and ZrO2 layers on (100)Si
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2140 since deposited on 2021-10-14
Acq. date: 2025-10-23
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Views
2140 since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations