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Electron spin resonance analysis of interfacial Si dangling bond type defects in stack of ultrathin SiO2, Al2O3, and ZrO2 layers on (100)Si

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2141 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08

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2141 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08

Citations