Publication:
Characterization of silicon carbon nitride for low temperature wafer-to-wafer direct bonding
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1972 since deposited on 2021-10-29
1last month
Acq. date: 2026-01-09
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Metrics
Views
1972 since deposited on 2021-10-29
1last month
Acq. date: 2026-01-09
Citations