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Particle removal from Si substrates in organic solvents using megasonic energy
Publication:
Particle removal from Si substrates in organic solvents using megasonic energy
Date
2007
Proceedings Paper
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14807.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Barbagini, Francesca
;
Janssens, Tom
;
Bearda, Twan
;
Armini, Silvia
;
Van Hoeymissen, Jan
;
Le, Quoc Toan
;
Mertens, Paul
;
Fransaer, Jan
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1941
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1941
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations