Publication:

Particle removal from Si substrates in organic solvents using megasonic energy

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorBarbagini, Francesca
dc.contributor.authorJanssens, Tom
dc.contributor.authorBearda, Twan
dc.contributor.authorArmini, Silvia
dc.contributor.authorVan Hoeymissen, Jan
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorMertens, Paul
dc.contributor.authorFransaer, Jan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.date.accessioned2021-10-16T15:02:26Z
dc.date.available2021-10-16T15:02:26Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11693
dc.source.beginpage101
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
dc.source.conferencedate7/10/2007
dc.source.conferencelocationWashington, DC USA
dc.source.endpage108
dc.title

Particle removal from Si substrates in organic solvents using megasonic energy

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
14807.pdf
Size:
436.63 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions