Publication:
Selective wet removal of the SiN contact etch stop layer prior to S/D contact formation
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1999 since deposited on 2021-10-26
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Acq. date: 2026-08-05
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Statistics
Views
1999 since deposited on 2021-10-26
3last month
3last week
Acq. date: 2026-08-05
Citations