Publication:
Specifics of cross-section analyses on semiconductor multi-layers
Date
| dc.contributor.author | Koelling, Sebastian | |
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Innocenti, Nicolas | |
| dc.contributor.author | Kambham, Ajay Kumar | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-18T17:45:57Z | |
| dc.date.available | 2021-10-18T17:45:57Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17394 | |
| dc.source.conference | 52nd International Field Emission Symposium - IFES | |
| dc.source.conferencedate | 5/07/2010 | |
| dc.source.conferencelocation | Sydney Australia | |
| dc.title | Specifics of cross-section analyses on semiconductor multi-layers | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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