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Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and & gamma;-radiolysis
Publication:
Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and & gamma;-radiolysis
Date
2023
Journal article
https://doi.org/10.35848/1347-4065/ace012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Takata, Yui
;
Muroya, Yusa
;
Kozawa, Takahiro
;
Machida, Kohei
;
Enomoto, Satoshi
;
Naqvi, Bilal
;
De Simone, Danilo
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
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885
since deposited on 2023-08-02
Acq. date: 2025-10-25
Citations
Metrics
Views
885
since deposited on 2023-08-02
Acq. date: 2025-10-25
Citations