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Work function tunability of refractory metal nitrides by lanthanum or aluminum doping for advanced CMOS devices
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1 since deposited on 2021-10-16
Acq. date: 2026-04-07
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1954 since deposited on 2021-10-16
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Acq. date: 2026-04-07
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1 since deposited on 2021-10-16
Acq. date: 2026-04-07
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1954 since deposited on 2021-10-16
3last month
Acq. date: 2026-04-07
Citations