Publication:

Work function tunability of refractory metal nitrides by lanthanum or aluminum doping for advanced CMOS devices

Date

2007
Journal article
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Author(s)

Wang, X.P.
;
Lim, A.E.J.
;
Yu, HongYu
;
Li, M.F.
;
Ren, C.
;
Loh, W.Y.
;
Zhu, C.X
;
Chin, A.
;
Trigg, A.D.
;
Yeo, Y.C.
;
Biesemans, Serge  
;
Lo, G.Q.
;
Kwong, D.L.

Journal

IEEE Trans. Electron Devices

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