Publication:
H2O and O3 based atomic layer deposition of high-k dielectric layers on high mobility substrates
Date
Loading...
Journal
Abstract
Description
Statistics
Views
2050 since deposited on 2021-10-17
Acq. date: 2026-02-27
Citations
Statistics
Views
2050 since deposited on 2021-10-17
Acq. date: 2026-02-27
Citations