Publication:
H2O and O3 based atomic layer deposition of high-k dielectric layers on high mobility substrates
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2048 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
2048 since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations