Publication:

Simulation of Cu bulge-out by cyclic Cu surface diffusion FEM in Cu/SiCN hybrid bonding

Date

2023

Proceedings Paper

https://doi.org/10.1109/EuroSimE56861.2023.10100784

Simple item page Full metadata Statistics

Author(s)

;

De Messemaeker, Joke

;

Gonzalez, Mario

;

;

;

De Wolf, Ingrid

Journal

N/A

Metrics

803 since deposited on 2023-10-15

1last month

Acq. date: 2025-12-13