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Conference contributions
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Publication:
Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis
Date
2008
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Bearda, Twan
;
Mertens, Paul
;
Wada, Masayuki
Journal
Abstract
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1983
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1983
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations