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Publication:

Lithography options for the 32nm half pitch node and beyond

Date

2008

Proceedings Paper

Simple item page Full metadata Statistics

Files

17719.pdf 1.63 MB

Author(s)

;

Jansen, Philippe

;

;

Hendrickx, Eric

;

Maenhoudt, Mireille

;

Goethals, Mieke

;

Vandenberghe, Geert

Statistics

1999 since deposited on 2021-10-17

65last month

Acq. date: 2026-07-28