Relaxation induced excess leakage current in recessed Si1-xGex source/drain junctions

Simple item page Full metadata Statistics

Files

14914.pdf 439.05 KB

Author(s)

Bargallo Gonzalez, Mireia

;

Chowdhury, Mohammad Kamruzzaman

;

;

Verheyen, Peter

;

;

Richard, Olivier

;

;

;

;

Machkaoutsan, Vladimir

;

;

;

;

Weijtmans, J.W.

;

Metrics

1929 since deposited on 2021-10-16

Acq. date: 2025-10-23