Publication:

Relaxation induced excess leakage current in recessed Si1-xGex source/drain junctions

Date

2007

Proceedings Paper

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Files

14914.pdf 439.05 KB

Author(s)

Bargallo Gonzalez, Mireia

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Chowdhury, Mohammad Kamruzzaman

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;

Verheyen, Peter

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Richard, Olivier

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Machkaoutsan, Vladimir

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Weijtmans, J.W.

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Metrics

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Acq. date: 2025-12-10