Publication:

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Date

2011
Journal article
https://doi.org/10.1116/1.3534018
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21471.pdf 680.12 KB

Author(s)

Popovici, Mihaela Ioana  
;
Van Elshocht, Sven  
;
Menou, Nicolas
;
Favia, Paola  
;
Bender, Hugo  
;
Rosseel, Erik  
;
Swerts, Johan  
;
Adelmann, Christoph  
;
Vrancken, Christa  
;
Moussa, Alain  
;
Tielens, Hilde  
;
Tomida, Kazuyuki  
;
Pawlak, Malgorzata
;
Kaczer, Ben  
;
Schoofs, Geert  
;
Vandervorst, Wilfried  
;
Wouters, Dirk
;
Kittl, Jorge

Journal

Journal of Vacuum Science and Technology B

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