Publication:

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Date

2011

Journal article

https://doi.org/10.1116/1.3534018

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Files

21471.pdf 680.12 KB

Author(s)

Popovici, Mihaela Ioana

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Van Elshocht, Sven

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Adelmann, Christoph

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Vrancken, Christa

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Tomida, Kazuyuki

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Pawlak, Malgorzata

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Vandervorst, Wilfried

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Journal

Journal of Vacuum Science and Technology B

Statistics

1 since deposited on 2021-10-19

Acq. date: 2026-05-30

1916 since deposited on 2021-10-19

Acq. date: 2026-05-30