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Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
Publication:
Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
Date
2011
Journal article
https://doi.org/10.1116/1.3534018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Popovici, Mihaela Ioana
;
Van Elshocht, Sven
;
Menou, Nicolas
;
Favia, Paola
;
Bender, Hugo
;
Rosseel, Erik
;
Swerts, Johan
;
Adelmann, Christoph
;
Vrancken, Christa
;
Moussa, Alain
;
Tielens, Hilde
;
Tomida, Kazuyuki
;
Pawlak, Malgorzata
;
Kaczer, Ben
;
Schoofs, Geert
;
Vandervorst, Wilfried
;
Wouters, Dirk
;
Kittl, Jorge
Journal
Journal of Vacuum Science and Technology B
Abstract
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since deposited on 2021-10-19
Acq. date: 2025-10-23
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Downloads
1
since deposited on 2021-10-19
Acq. date: 2025-10-23
Views
1903
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations