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Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

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1 since deposited on 2021-10-19
Acq. date: 2025-10-23

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1903 since deposited on 2021-10-19
Acq. date: 2025-10-23

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1 since deposited on 2021-10-19
Acq. date: 2025-10-23

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1903 since deposited on 2021-10-19
Acq. date: 2025-10-23

Citations