Publication:

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Date

2011
Journal article
https://doi.org/10.1116/1.3534018
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorRosseel, Erik
dc.contributor.authorSwerts, Johan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVrancken, Christa
dc.contributor.authorMoussa, Alain
dc.contributor.authorTielens, Hilde
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKaczer, Ben
dc.contributor.authorSchoofs, Geert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorSchoofs, Geert
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-19T17:32:28Z
dc.date.available2021-10-19T17:32:28Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.doi10.1116/1.3534018
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19603
dc.identifier.urlhttp://avspublications.org/jvstb/resource/1/jvtbd9/v29/i1/p01A304_s1
dc.source.beginpage01A304
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume29
dc.title

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

dc.typeJournal article
dspace.entity.typePublication
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