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Characterization of the Mechanical Stress induced during Silicidation in sub-0.25μm MOS Technologies
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Characterization of the Mechanical Stress induced during Silicidation in sub-0.25μm MOS Technologies
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Date
2001-01
Dissertation
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5699.pdf
12.51 MB
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Steegen, An
Journal
Abstract
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1
since deposited on 2021-10-14
Acq. date: 2026-01-08
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1969
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-08
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Downloads
1
since deposited on 2021-10-14
Acq. date: 2026-01-08
Views
1969
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-08
Citations