Publication:
Characterization of the Mechanical Stress induced during Silicidation in sub-0.25μm MOS Technologies
Date
| dc.contributor.author | Steegen, An | |
| dc.contributor.thesisadvisor | Maex, Karen | |
| dc.contributor.thesisadvisor | Van Houtte, Paul | |
| dc.date.accessioned | 2021-10-14T17:52:53Z | |
| dc.date.available | 2021-10-14T17:52:53Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2001-01 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5673 | |
| dc.title | Characterization of the Mechanical Stress induced during Silicidation in sub-0.25μm MOS Technologies | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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| Publication available in collections: |