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Benchmarking Ge1-xSnx CVD Epitaxy using GeH4 and Ge2H6

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1978 since deposited on 2021-10-23
2last month
Acq. date: 2026-08-05

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1978 since deposited on 2021-10-23
2last month
Acq. date: 2026-08-05

Citations