Publication:

Test structure to investigate the series resistance components of source/drain structure

Date

1997
Journal article
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dc.contributor.authorBiesemans, Serge
dc.contributor.authorKubicek, Stefan
dc.contributor.authorDe Meyer, Kristin
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorDe Meyer, Kristin
dc.date.accessioned2021-09-30T07:57:14Z
dc.date.available2021-09-30T07:57:14Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1740
dc.source.beginpage477
dc.source.endpage479
dc.source.issue10
dc.source.journalIEEE Electron Device Letters
dc.source.volume18
dc.title

Test structure to investigate the series resistance components of source/drain structure

dc.typeJournal article
dspace.entity.typePublication
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