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Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Publication:
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers
Date
2011
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zhao, Larry
;
Lofrano, Melina
;
Croes, Kristof
;
Van Besien, Els
;
Tokei, Zsolt
;
Wilson, Chris
;
Degraeve, Robin
;
Kauerauf, Thomas
;
Beyer, Gerald
;
Claeys, Cor
Journal
Thin Solid Films
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1957
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
1957
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations