Publication:
3D FinFET gate etch for advanced CMOS scaling
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2099 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-01-09
Citations
Metrics
Views
2099 since deposited on 2021-10-27
2last month
1last week
Acq. date: 2026-01-09
Citations