Publication:

Polymer and bump planarization for fine pitch micro-bump stacking

Date

2018

Meeting abstract

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Author(s)

Inoue, Fumihiro

;

Derakhshandeh, Jaber

;

Moeller, Berthold

;

;

;

;

Capuz, Giovanni

;

Rebibis, Kenneth June

;

;

;

;

Metrics

1866 since deposited on 2021-10-25

Acq. date: 2026-01-07