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Modelling of crystal originated particles and their impact on gate oxide integrity
Publication:
Modelling of crystal originated particles and their impact on gate oxide integrity
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bearda, Twan
;
Mertens, Paul
;
Woerlee, P. H.
;
Wallinga, H.
;
Schmolke, R.
;
Heyns, Marc
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1985
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1985
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations