Publication:
Modelling of crystal originated particles and their impact on gate oxide integrity
Date
| dc.contributor.author | Bearda, Twan | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Woerlee, P. H. | |
| dc.contributor.author | Wallinga, H. | |
| dc.contributor.author | Schmolke, R. | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.date.accessioned | 2021-10-14T21:08:24Z | |
| dc.date.available | 2021-10-14T21:08:24Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6000 | |
| dc.source.beginpage | 528 | |
| dc.source.conference | Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology | |
| dc.source.conferencedate | 12/05/2002 | |
| dc.source.conferencelocation | Philadelphia, PA USA | |
| dc.source.endpage | 539 | |
| dc.title | Modelling of crystal originated particles and their impact on gate oxide integrity | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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