Publication:

Alternative EUV multilayer mirror mask for reduced mask 3D effects evaluated at NA0.33

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3071379
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dc.contributor.authorKovalevich, Tatiana
dc.contributor.authorPellens, Nick
dc.contributor.authorLibeert, Guillaume
dc.contributor.authorVan Look, Lieve
dc.contributor.authorFrommhold, Andreas
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorAbe, Tsukasa
dc.contributor.authorFujimura, Yukihiro
dc.contributor.authorHotei, Izumi
dc.contributor.authorEbisawa, Mei
dc.contributor.authorYamaji, Masataka
dc.contributor.authorTomizuka, Shosuke
dc.contributor.authorYoshikawa, Shingo
dc.date.accessioned2026-03-31T07:57:35Z
dc.date.available2026-03-31T07:57:35Z
dc.date.createdwos2026-02-20
dc.date.issued2025
dc.description.wosFundingTextThe authors thank Imec LithoRise team and DNP experts for fruitful discussions. We also thank imec OPC team and ARCaDi software, together with Brion MXP and Synopsis S-Litho_EUV simulation and data analysis tools for facilitation of this study. This work has been enabled in part by the NanoIC pilot line. The acquisition and operation are jointly funded by the Chips Joint Undertaking, through the European Union's Digital Europe (101183266) and Horizon Europe programs (101183277), as well as by the participating states Belgium (Flanders), France, Germany, Finland, Ireland and Romania. For more information, visit nanoic-project.eu.
dc.identifier.doi10.1117/12.3071379
dc.identifier.isbn978-1-5106-9320-3
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/58978
dc.language.isoeng
dc.provenance.editstepusergreet.vanhoof@imec.be
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage1368711
dc.source.conferencePhotomask Technology
dc.source.conferencedate2025-09-22
dc.source.conferencelocationMonterey
dc.source.journalPHOTOMASK TECHNOLOGY 2025
dc.source.numberofpages10
dc.title

Alternative EUV multilayer mirror mask for reduced mask 3D effects evaluated at NA0.33

dc.typeProceedings paper
dspace.entity.typePublication
imec.internal.crawledAt2026-02-23
imec.internal.sourcecrawler
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