Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
Publication:
A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
Date
2001
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lanckmans, Filip
;
Gray, William
;
Brijs, Bert
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
2054
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2054
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations