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A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
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A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lanckmans, Filip
;
Gray, William
;
Brijs, Bert
;
Maex, Karen
Journal
Microelectronic Engineering
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2058
since deposited on 2021-10-14
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Acq. date: 2026-01-10
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Metrics
Views
2058
since deposited on 2021-10-14
1
last month
Acq. date: 2026-01-10
Citations