Publication:
Influence of the Ge-concentration and RTA on the device performance of strained Si/SiGe pMOS devices
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1804 since deposited on 2021-10-14
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Acq. date: 2026-04-06
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Statistics
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1804 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2026-04-06
Citations