Study of CVD high-k gate oxides on high-mobility Ge and Ge/Si substrates

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Author(s)

Van Elshocht, Sven

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Conard, Thierry

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De Gendt, Stefan

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De Jaeger, Brice

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Van Steenbergen, Jan

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Vandervorst, Wilfried

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Metrics

1899 since deposited on 2021-10-16

Acq. date: 2025-10-23