Publication:

Study of CVD high-k gate oxides on high-mobility Ge and Ge/Si substrates

Date

2005

Proceedings Paper

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Author(s)

Van Elshocht, Sven

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;

Conard, Thierry

;

De Gendt, Stefan

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;

;

;

;

De Jaeger, Brice

;

Van Steenbergen, Jan

;

Vandervorst, Wilfried

;

;

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Acq. date: 2026-01-25