Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
Publication:
Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
Copy permalink
Date
2009
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
18699.pdf
517.15 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kaczer, Ben
;
Veloso, Anabela
;
Roussel, Philippe
;
Grasser, T.
;
Groeseneken, Guido
Journal
Journal of Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1899
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1899
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations