Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks

dc.contributor.author	Kaczer, Ben
dc.contributor.author	Veloso, Anabela
dc.contributor.author	Roussel, Philippe
dc.contributor.author	Grasser, T.
dc.contributor.author	Groeseneken, Guido
dc.contributor.imecauthor	Kaczer, Ben
dc.contributor.imecauthor	Veloso, Anabela
dc.contributor.imecauthor	Roussel, Philippe
dc.contributor.imecauthor	Groeseneken, Guido
dc.contributor.orcidimec	Kaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimec	Roussel, Philippe::0000-0002-0402-8225
dc.date.accessioned	2021-10-17T23:16:47Z
dc.date.available	2021-10-17T23:16:47Z
dc.date.embargo	9999-12-31
dc.date.issued	2009
dc.identifier.issn	1071-1023
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/15560
dc.source.beginpage	459
dc.source.endpage	462
dc.source.issue	1
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	27
dc.title	Investigation of bias-temperature instability in work-function-tuned high-k/metal-gate stacks
dc.type	Journal article
dspace.entity.type	Publication
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