Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Plasma nitridation for atomic layer etching of Ni
Publication:
Plasma nitridation for atomic layer etching of Ni
Copy permalink
Date
2024
Journal article
https://doi.org/10.1116/6.0003263
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Smith, Taylor G.
;
Abelgawad, Ali
;
de Marneffe, Jean-Francois
;
Chang, Jane P.
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Abstract
Description
Metrics
Views
641
since deposited on 2024-02-11
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
641
since deposited on 2024-02-11
1
last month
Acq. date: 2025-12-15
Citations