Publication:
Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM
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1941 since deposited on 2021-10-16
6last month
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Acq. date: 2026-04-27
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Statistics
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1941 since deposited on 2021-10-16
6last month
3last week
Acq. date: 2026-04-27
Citations