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Defect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility transistors

Date

2005
Journal article
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dc.contributor.authorEneman, Geert
dc.contributor.authorSimoen, Eddy
dc.contributor.authorDelhougne, Romain
dc.contributor.authorGaubas, Eugenijus
dc.contributor.authorSimons, Veerle
dc.contributor.authorRoussel, Philippe
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLauwers, Anne
dc.contributor.authorLoo, Roger
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorDelhougne, Romain
dc.contributor.imecauthorSimons, Veerle
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecSimons, Veerle::0000-0001-5714-955X
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-16T01:29:37Z
dc.date.available2021-10-16T01:29:37Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10427
dc.source.beginpageS2197
dc.source.endpageS2210
dc.source.issue22
dc.source.journalJournal of Physics: Condensed Matter
dc.source.volume17
dc.title

Defect analysis of strained silicon on thin strain-relaxed buffer layers for high mobility transistors

dc.typeJournal article
dspace.entity.typePublication
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