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Metal1 patterning study for randon-logic applications with 193i, using calibrated OPC for litho and etch
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1914 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-11
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Metrics
Views
1914 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-11
Citations