Publication:
Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements
Date
| dc.contributor.author | Norga, Gerd | |
| dc.contributor.author | Platero, M. | |
| dc.contributor.author | Black, K. A. | |
| dc.contributor.author | Reddy, A. J. | |
| dc.contributor.author | Michel, J. | |
| dc.contributor.author | Kimerling, L. C. | |
| dc.date.accessioned | 2021-10-01T08:34:08Z | |
| dc.date.available | 2021-10-01T08:34:08Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2810 | |
| dc.source.beginpage | 2602 | |
| dc.source.endpage | 2607 | |
| dc.source.issue | 7 | |
| dc.source.journal | J. Electrochem. Soc. | |
| dc.source.volume | 145 | |
| dc.title | Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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