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Diffusion and gate replacement: a new gate-first high-k/metal gate CMOS integration scheme suppressing gate height symmetry
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1968 since deposited on 2021-10-23
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Acq. date: 2025-12-08
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Views
1968 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2025-12-08
Citations